Review of metal-containing resists in electron beam lithography: perspectives for extreme ultraviolet patterning

Helium Ion Beam Lithography on Fullerene Molecular Resists for Sub-10 nm Patterning

Xiaoqing Shi , Philip Prewett , Ejaz Huq , Darren M Bagnall , Alex P G Robinson, Stuart A Boden , a Electronics and Computer Science, University of Southampton, Southampton, SO16 1BJ, UK b Oxford Scientific Consultants Ltd., 67 High Street, Dorchester, Oxfordshire, OX10 7HN, UK c Faculty of Engineering, The University of New South Wales 3, Sydney, NSW 2052, Australia d School of Chemical Engine...

Electron beam lithography of HSQ/PMMA bilayer resists for negative tone lift-off process

A HSQ/PMMA bilayer resist system, in which HSQ as negative tone electron beam resist top layer and PMMA as bottom layer, has been investigated for negative tone lift-off process. Patterns are first defined on the HSQ resist using electron beam lithography, and then transferred into the bottom PMMA layer using oxygen reactive ion etching. Electron beam exposure of HSQ on top of PMMA layer has be...

Development of Inorganic Resists for Electron Beam Lithography: Novel Materials and Simulations

9. Nanoimprint Lithography – Patterning of Resists Using Molding

Nanoimprint lithography (NIL) is an emerging high-resolution parallel patterning method, mainly aimed towards fields in which electronbeam and high-end photolithography are costly and do not provide sufficient resolution at reasonable throughput. In a top-down approach, a surface pattern of a stamp is replicated into a material by mechanical contact and threedimensional material displacement. T...

Electron Beam Lithography of Fresnel Zone Plates Using A Rectilinear Machine And Trilayer Resists

We describe the use of a commercial e-beam lithography system (JEOL JBX-6000FS) to fabricate Fresnel zone plates for x-ray microscopy. The machine is capable of controlling the pitch of optical gratings with sub-nanometer precision, so its beam placement properties are more than adequate for zone plate fabrication. The zone plate pattern is written into a thin top layer (PMMA or Calixarene) of ...